| 摘要 |
<p>PURPOSE: To provide a wafer boat, which allows no rattle of housed wafers, shows less non-heat treated parts, and gives a high yield of products. CONSTITUTION: This wafer boat is formed in such a manner that a plurality of grooves, which are provided on the upper parallel supporting rods 2 and 3 supporting the lower part of a wafer 1 from both sides and the lower parallel supporting rods 4 and 5 are widely formed, and the grooves provided opposing to each supporting rods are formed in such a manner that the prooves are shifted in the amount obtained by subtracting wafer thickness from groove width to the longitudinal direction of the supporting rods.</p> |
