| 发明名称 |
BOX FOR TRANSFERRING SEMICONDUCTOR WAFER |
| 摘要 |
A box (21) for tranferring a semiconductor wafer, having an opening/closing mechanism for putting in/taking out a wafer, characterized by comprising a gas cleaning device A-2 wich uses photoelectrons produced by irradiation with light or an optical catalyst for cleaning the interior of the box, or a gas cleaning unit which includes the gas cleaning device and a battery-mounted power source device with a function of charging the battery for supplying electric power to the gas cleaning device. Thus, the box has a practically effective function of removing fine particles and gaseous harmful components.
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| 申请公布号 |
WO9928966(A1) |
申请公布日期 |
1999.06.10 |
| 申请号 |
WO1998JP05368 |
申请日期 |
1998.11.30 |
| 申请人 |
EBARA CORPORATION;FUJII, TOSHIAKI;HORITA, OSAMU |
发明人 |
FUJII, TOSHIAKI;HORITA, OSAMU |
| 分类号 |
H01L21/00;H01L21/673;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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