发明名称 METHOD OF MANUFACTURING ELECTRONIC COMPONENT MANUFACTURING BASE AND CLEANING SOLVENT
摘要 PROBLEM TO BE SOLVED: To provide a method suited for manufacturing an electronic component manufacturing base using a ring structure-containing hardening resin, and a cleaning solvent suited for cleaning the ring structure-containing hardening resin. SOLUTION: The method of manufacturing a base for manufacturing electronic components comprises a step of applying on the base a hardening resin solution of a ring structure-containing hardening resin dissolved or dispersed in an organic solvent, a step of processing and removing unwanted hardening resin solution deposited to at least a part of the periphery, edges and backside of the base using a cleaning solvent composed of a nonpolar solvent and a polar solvent, and a step of drying the applied hardening resin on the base and a cleaning solvent suited thereto.
申请公布号 JP2001313290(A) 申请公布日期 2001.11.09
申请号 JP20000129404 申请日期 2000.04.28
申请人 NIPPON ZEON CO LTD 发明人 ODEMURA JUNJI
分类号 C11D7/50;C09D201/02;C11D7/24;C11D11/00;G03F7/16;G03F7/42;H01L21/311;H01L21/312;H01L21/56;(IPC1-7):H01L21/312 主分类号 C11D7/50
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