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发明名称
CVD APPARATUS OF SEMICONDUCTOR FABRICATING PROCESS
摘要
申请公布号
KR940002768(Y1)
申请公布日期
1994.04.23
申请号
KR19910018151U
申请日期
1991.10.29
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, YUN - KI;KIM, BYONG - RYOL;PARK, MUN - KYU
分类号
H01L21/31;(IPC1-7):H01L21/31
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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