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发明名称
Manufacturing Method of Sputtering Target and Sputtering Target
摘要
申请公布号
KR100771434(B1)
申请公布日期
2007.10.30
申请号
KR20060024106
申请日期
2006.03.15
申请人
发明人
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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