Substrate recycling method and recycled substrate

摘要

Exemplary embodiments of the present invention provide a substrate recycling method and a recycled substrate. The method includes separating a substrate having a first surface from an epitaxial layer, performing a first etching of the first surface using electrochemical etching, and performing, after the first etching, a second etching of the first surface using chemical etching, dry etching, or performing, after the first etching, chemical mechanical polishing of the first surface.

主权项

1. A substrate recycling method, the method comprising:
separating a substrate comprising a first surface from an epitaxial layer; performing a first etching of the first surface using electrochemical etching; and performing, after the first etching, a second etching of the first surface using chemical etching or dry etching, or performing, after the first etching, chemical mechanical polishing of the first surface, wherein: the first surface comprises a sacrificial layer; and the substrate further comprises an etching stop layer disposed under the sacrificial layer.