| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of preventing the ignition by the adhesion of dust including debris.SOLUTION: A laser beam machining apparatus (1) comprises a chuck table (15) for retaining a work piece (W), a laser beam irradiation means (14) equipped with a condenser (141) for radiating a laser beam to the work-piece and a dust discharge means (143) for exhausting by sucking dust generated in the neighborhood of a machining point by the laser beam. Further, the apparatus includes: a wet process dust processing device (145) for exhausting only the exhaust supplemented with the dust to a duct (147) by catching the dust contained in the exhaust connected to the dust discharge means through a discharge pipe (144a) by liquid (L); wherein piping (144b) communicating from the wet process dust processing device to the duct is branched on the way, and branched piping (144c and 144d) are made to supply the high-humidity exhaust communicated in the neighborhood of the condenser and passed through the wet process dust processing device in the neighborhood of the machining point. |
