主权项 |
1. A method of fabricating a cantilever beam for an electromechanical display, the method comprising:
forming a mold on a surface having a sidewall and a top, depositing a layer of beam material on the sidewall of the mold, applying a photo-resist layer on the layer of beam material, positioning a first photo-mask over the mold, illuminating with a light having light rays inclined with respect to the surface from one or more directions to form an image having geometric shapes of the cantilever beam on the photo-resist layer applied on the layer of beam material deposited on the sidewall of the mold. |