发明名称 MEMS Display Manufacturing Method
摘要 Electromechanical light modulators and backlight providing efficient, low cost and high performance displays.
申请公布号 US2016194197(A1) 申请公布日期 2016.07.07
申请号 US201514589715 申请日期 2015.01.05
申请人 Pakhchyan Edward 发明人 Pakhchyan Edward
分类号 B81C1/00;G02B26/08 主分类号 B81C1/00
代理机构 代理人
主权项 1. A method of fabricating a cantilever beam for an electromechanical display, the method comprising: forming a mold on a surface having a sidewall and a top, depositing a layer of beam material on the sidewall of the mold, applying a photo-resist layer on the layer of beam material, positioning a first photo-mask over the mold, illuminating with a light having light rays inclined with respect to the surface from one or more directions to form an image having geometric shapes of the cantilever beam on the photo-resist layer applied on the layer of beam material deposited on the sidewall of the mold.
地址 Glendale CA US