发明名称 |
Verfahren zur materialdifferenzierenden elektronenmikroskopischen Abbildung isolierender Oberflaechen mit Hilfe von aus der abzubildenden Oberflaeche durch elektromagnetische Strahlung ausgeloesten Elektronen |
摘要 |
Electron-microscopic projection method of surfaces using electrons freed by electro-magnetic radiation from the projected surfaces, suitable for mineral, glass ceramic and biological testing, features the provision of a coating which is thin in relation to the entry depth of the electrons after which electron microscope projection take places, retaining material differentiation. |
申请公布号 |
DE1934944(A1) |
申请公布日期 |
1970.07.09 |
申请号 |
DE19691934944 |
申请日期 |
1969.07.10 |
申请人 |
BALZERS & PFEIFFER HOCHVAKUUM GMBH |
发明人 |
LIENHARD WEGMANN,DR.;GRIBI,MARCEL;GRABER,ROLF |
分类号 |
H01J37/28;H01J37/285 |
主分类号 |
H01J37/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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