Vorrichtung zum chemischen Duenneraetzen duenner Koerper,insbesondere Halbleiterkristallscheiben

摘要

Chemical etching of semiconductor crystal plates Each plate is fastened to its own horizontally rotating carrier, plates and carriers are covered continuously with an etchant for the whole etching period. The carriers have a toothed wheel shape and at least one engages operationally with a drive gear wheel.