| 摘要 |
PURPOSE:To improve the quality and the reliability of a thin film magnetic head by providing a dummy thin film layer, whose thickness is approximately equal to that of each thin film forming a magnetic head part, in a position different from the arranging position of the magnetic head part on a substrate. CONSTITUTION:With respect to a thin film magnetic head 9 where a magnetic head 11 consisting of a conductor thin film and a magnetic material thin film or a compound semiconductor thin film is formed on a substrate 10, a dummy thin film layer 17 whose thickness is approximately equal to that of each thin film is provided in a position different from the arranging position of the magnetic head part 11 on the substrate 10. A dummy thin film 18 is formed with a conductor in a position different from the forming position of a coil pattern simultaneously with formation of the coil pattern, and a dummy thin film 19 is formed with the same materials as the magnetic material thin film or the compound semiconductor thin film in a position different from the forming position of a core pattern simultaneously with formation of the core pattern consisting of the magnetic thin film or the compound semiconductor thin film. Since the upper face of the magnetic head part 11 and that of the dummy thin film layer 17 are in the same level approximately, a uniform pressure is applied to the magnetic head part when a protective substrate 16 is adhered by pressure, and the quality of the thin film magnetic head is improved. |
