MEASURING APPARATUS HAVING SURFACE ROUGHNESS MEASURING PROBE

摘要

PURPOSE:To enable the measurement of surface roughness simultaneously with the measurement of the dimension or shape of a work, by mounting a surface roughness meter for detecting the displacement of the stylus contacted with the measuring surface of an article to be measured to a measuring main shaft moving to a multidimensional direction through a probe. CONSTITUTION:A surface roughness meter 43 is mounted to the measuring main shaft 23 of a measuring main body 30 automatically moved to a multidimensional direction according to preset procedure in a freely detachable manner through a probe main body 41, and a displacement detection part 40 for detecting the displacement of the stylus 50 contacted with the measuring surface of an article to be measured and the stylus 50 are moved. A control circuit 55 is provided to the probe main body 41 and the stylus 50 is moved through a drive mechanism on the basis of the start signal imparted from the side of the measuring machine main body 30 while the roughness measuring data detected by the movement of the stylus 50 is sent out to the measuring machine main body side.