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发明名称
VERFAHREN UND EINRICHTUNG ZUR ERZEUGUNG VON MIKROWELLENPLASMEN MIT GROSSER AUSDEHNUNG UND HOMOGENITAET
摘要
申请公布号
DD263648(A1)
申请公布日期
1989.01.04
申请号
DD19870306478
申请日期
1987.08.31
申请人
VEB HOCHVAKUUM DRESDEN,DD
发明人
OHL,ANDREAS,DD;SCHMIDT,MARTIN,DD;RUEGER,THEA,DD;WILBERG,RUEDIGER,DD
分类号
H01L21/203;H01L21/3065;H05H1/46;(IPC1-7):H05H1/46
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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