APPARATUS FOR DETECTING FORCE, ACCELERATION, AND MAGNETISM

摘要

PROBLEM TO BE SOLVED: To provide a multi-dimensional sensor with a simple structure without requiring temperature compensation. SOLUTION: A fixed substrate 10 having rigidity and a displaceable substrate 20 having flexibility are housed in an apparatus box 40. A work body 30 working as a weight is fixed in the lower face of the displaceable substrate 20. Two displaceable electrodes 21, 23 are formed in the X-axis and two displaceable electrodes are formed in the Y-axis on the upper face of the displaceable substrate 20 and a common fixed electrode 11 is formed on the lower face of the fixed substrate 10 while facing the respective displaceable electrodes and four capacity elements are formed by the four pairs of the electrodes opposed to each other. The acceleration in the X-axis is detected based on the capacity value difference of the two pairs of capacity elements arranged in the x-axis and the acceleration in the y-axis is detected based on the capacity value difference of the two pairs of capacity elements arranged in the Y-axis.