| 摘要 |
PROBLEM TO BE SOLVED: To provide a light source device of a dierectric barrier discharge lamp, capable of effectively forming excimer molecules and effectively operating as a vacuum ultraviolet light source. SOLUTION: A dierectric barrier discharge lamp 1 is lighted up by applying a high frequency alternating voltage supplied from a feeder device 8 composed of a high frequency power supply 9 of a bridge system, a push-pull system, and a flyback system and a transformer Tr. In a case, such a voltage is applied to the dielectric barrier discharge lamp 1 in such a way that a differential time required from reaching of a largest maximum value till reaching of a next maximum value is set to be 3μs or less, after the time when reaching such a voltage that the dielectric barrier discharge is started. In another case, such a voltage may be applied to the dielectric barrier discharge lamp 1 in such a condition that the differential time from reaching of a voltage value that the dielectric barrier discharge is started, till reaching of a largest voltage at the time required when a new lamp voltage is applied is set to be 2.1μs.
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