| 摘要 |
PURPOSE: Provided are a developing apparatus having vertical blast nozzles which can spread a developer on the whole photosensitive film and a process for producing a mask by using the developing apparatus. CONSTITUTION: The developing apparatus includes a first blast nozzle(80) located at the center of the photosensitive film and a second blast nozzle(82) located side by side with the first blast nozzle(80) between the first blast nozzle(80) and the edge of the photosensitive film, wherein the blast nozzles(80,82) exclude air. Further, the process for producing the mask(40) comprises the steps of: forming a light-shading film on an optically transparent substrate; coating the surface of the light-shading film with the photosensitive film; exposing the fixed area of the photosensitive film to an electronic beam; injecting the developer vertically onto the photosensitive film by using the blast nozzles(80,82) in order to remove the exposed area of the photosensitive film; etching the light-shading film; removing the photosensitive film. |
