| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate accommodating container capable of preventing a substrate from moving in the substrate accommodating container even when vibration and fluctuations are applied to the substrate accommodating container, and capable of preventing ends of the substrate from being damaged by collision thereof with constituent components of the substrate. SOLUTION: A substrate support 6 is supported from the lower side of the substrate 1 in its horizontal state. A substrate press 12 is disposed vertically movably in the vicinity of the substrate support 6. The substrate press 12 makes contact with the substrate 1 from an upper side on the opposite side to the substrate support 6 to sandwich the substrate 1 between it and the substrate support 6 for fixation thereof. The substrate press 12 is mounted on a movable columnar support 10 that penetrates the bottom 2 of the substrate accommodating container and is movable vertically. COPYRIGHT: (C)2007,JPO&INPIT |
