HEATER FORMED WITH ALUMINUM COATING LAYER THEREON AND MANUFACTURING METHOD THEREOF

摘要

A heater with an aluminum coating layer and a method for manufacturing the same are provided to prevent corrosion of the heater and plasma damage at high temperature by using an aluminum diffusion coating process and a heat treatment. A mixture powder is filled in a furnace. The mixture powder is a mixture of an aluminum powder, an activator, and a sintering protection agent. A nickel metal heater(3) to be coated is placed in the furnace which is filled with the mixture powder. The nickel metal heater is processed with a diffusion heat treatment under argon or hydrogen atmosphere. The aluminum powder and the activator are reacted with each other to create a gas during the diffusion heat treatment. The gas is transferred to a surface of the nickel metal heater due to the slope of gas partial pressure between the mixture powder and the surface of the nickel metal heater. The gas transferred to the surface of the nickel metal heater forms a NiAl layer as a diffusion coating layer by decomposition and exchange reaction on the surface of the nickel metal heater. The nickel metal heater with the NiAl layer formed thereon is placed in oxidation heat treatment equipment. The nickel metal heater is thermally processed under an oxygen atmosphere to form a NiAl2O3 layer(7) as an oxide layer.