| 摘要 |
An apparatus comprising a substrate having one or more anchors formed thereon; a movable platform suspended by one or more tether beams from the one or more anchors; an actuator coupled to the movable platform; and a micro-electro-mechanical (MEMS) probe having a proximal end, a distal end and a longitudinal axis extending between the proximal end and the distal end, wherein the proximal end is coupled to the movable platform and the distal end can be actuated in a direction substantially normal to a surface of the substrate. A process comprising forming one or more anchors on a substrate; suspending a movable platform by one or more tether beams coupled to the one or more anchors; coupling an actuator to the movable platform; and coupling a micro-electro-mechanical (MEMS) probe to the movable platform, the MEMS probe having a proximal end, a distal end and a longitudinal axis extending between the proximal end and the distal end, wherein the proximal end is coupled to the movable platform and the distal end can be actuated in a direction substantially normal to a surface of the substrate.
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