DEVICE AND METHOD FOR LASER BEAM MACHINING AND WORKING METHOD FOR LEAD FRAME

摘要

PURPOSE:To improve the dimensional accuracy and the cleanness of a cut opening part, and to attain a satisfactory quality by suppressing the fitting of dross generated by a working to the end face of the cut opening part when performing a cut working using a slab laser beam. CONSTITUTION:A laser oscillator 1 is equipped with a slab type laser activator 20. A laser beam oscillated from the laser oscillator 1, is converged by a condenser lens 11 to become a laser beam with a rectangular section, and irradiates a material 2 to be worked to cut it. The energy density distribution of the section of the laser beam becomes a distribution gradually reducing in the longitudinal direction of the section by a dimming filter 24. Also, a direction in which the energy density distribution of the section of this laser beam reduces gradually is allowed to always coincide with the proceeding direction of a cutting.