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发明名称
摘要
申请公布号
JP2965188(B2)
申请公布日期
1999.10.18
申请号
JP19930297042
申请日期
1993.11.26
申请人
KYANON HANBAI KK
发明人
YAMAMOTO YOSHITO;MAEDA KAZUO
分类号
H01L21/205;C23C16/40;H01L21/316;(IPC1-7):H01L21/316
主分类号
H01L21/205
代理机构
代理人
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地址
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