| 摘要 |
PROBLEM TO BE SOLVED: To provide a sintered silicon nitride compact having a high heat conduction characteristic and excellent mechanical characteristics in combination. SOLUTION: This method for manufacturing the sintered Si3N4 compact consists in molding and sintering raw material powder prepared by adding oxide of at least one selected from the group consisting of Y and Ln group elements to Si3N4 powder, in which the Si3N4 powder is sintered while the Si3N4 particles are grown in such a manner that the Si3N4 powder contains Al at <=300 ppm and O at <=1.5 mass% and has an α type formation rate of <=70% and that the Si3N4 particles having a minor axis diameter of >=2 μm in the resultant sintered Si3N4 compact contains O, Al, Ca and Fe at <=1500 ppm in total and the Si3N4 particles having a minor axis diameter of <=2 μm contains O, Al, Ca and Fe at <=3,000 ppm in total. |
