STAGE APPARATUS, COORDINATE CORRECTION METHOD FOR THE STAGE APPARATUS, EXPOSURE APPARATUS, AND DEVICE PRODUCTION METHOD

摘要

A stage apparatus has a surface plate, a movement table (WTB) placed on the surface plate, a positional information measurement section for measuring information on the position of the movement table (WTB), a deformation amount detection section (45) for detecting the amount of deformation of at least one of the surface plate and the movement table (WTB), and a correction section for correcting the measurement result based on the detection result of the deformation amount detection section (45).