| 摘要 |
PROBLEM TO BE SOLVED: To provide the storage container and the storage method of an interlayer paper and a semiconductor wafer, which can prevent slippage of rotation between the semiconductor wafer and the interlayer paper during semiconductor wafer transport. SOLUTION: A protrusion 16 is provided, which can be interfolded toward interior from its perimeter, when a semiconductor wafer 13 is superimposed on an interlayer paper 14. When piling up the semiconductor wafer 13 via the interlayer paper 14, by folding the protrusion 16 of the interlayer paper according to the perimeter of the semiconductor wafer 13, by the protrusion 16 of the interlayer paper, the contact area between the semiconductor wafer 13 and the interlayer paper 14 can be increased, by making it possible to prevent slippage of rotation of the both during storage container transport. COPYRIGHT: (C)2008,JPO&INPIT
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