| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compound, resin, resist composition, etc., which can give a resist pattern with preferable shape. <P>SOLUTION: There are disclosed a compound expressed by formula (I), a resin having a structural unit originated from the compound, and a resist composition including the resin. In the formula, R<SP POS="POST">1</SP>and R<SP POS="POST">2</SP>each represents an aliphatic hydrocarbon group, or R<SP POS="POST">1</SP>and R<SP POS="POST">2</SP>bond together to form a ring; R<SP POS="POST">3</SP>is an alkyl group or the like which may have a halogen atom; m and n each denotes 0 or 1; and X<SP POS="POST">1</SP>represents a single bond, -O-(CH<SB POS="POST">2</SB>)<SB POS="POST">l</SB>-* or the like, wherein l is an integer of 1 to 6, and * represents an atomic bonding with O. <P>COPYRIGHT: (C)2013,JPO&INPIT |
