| 摘要 |
PURPOSE:To improve an adhesiveness of a Ti film to a TiN film layer by a method wherein the TiN film layer is provided on the Ti film provided on the surface of an Fe-B-Ra permanent magnet body via a nitrogen diffused layer, in which an N2 concentration is continuously increased. CONSTITUTION:A corrosin-resistant permanent magnet is formed into a structure, wherein a TiN film layer of a film thickness of 0.5 to 10mum is formed on the surface of an Fe-B-Ra permanent magnet body having its main phase consisting of a tetragonal phase via a Ti film of a film thickness of 0.1 to 30mum and an N diffused layer (a composition consisting of TiNx), in which an N2, concentration is continuously increased from the side of the magnet body toward the TiN film layer and which has a film thickness of 0.05 to 2.0mum, is provided in the surface of this Ti film. A method of manufacturing this permanent magnet is performed by a method wherein the surface of the permanent magnet body is cleaned and thereafter, the Ti film is formed on the surface of the magnet body, then, the mixed gas of Ar gas and N2, gas is introduced in a treating container while the amount of the N2, gas is continuously increased and after the N diffused layer, in which the N2 concentration is increased, is formed in the Ti film, the TiN film layer is formed. |
