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发明名称	HALBLEITERVORRICHTUNG
摘要
申请公布号	DE1514855(B2)	申请公布日期	1971.09.30
申请号	DE19651514855	申请日期	1965.08.20
申请人		发明人
分类号	H01L21/316;H01L23/522;H01L29/00;(IPC1-7):01H5/00	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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