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发明名称
Method of manufacturing a semiconductor device using a main vernier pattern formed at a right angle to a subsidiary vernier pattern
摘要
申请公布号
US5017514(A)
申请公布日期
1991.05.21
申请号
US19890441522
申请日期
1989.11.27
申请人
NEC CORPORATION
发明人
NISHIMOTO, SHOZO
分类号
G01D13/10;G03F7/20;G03F9/00;H01L21/027;H01L21/30;H01L21/66
主分类号
G01D13/10
代理机构
代理人
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地址
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