SENSOR ELEMENT FOR AN IMAGE SENSOR WITH A WAFER LAYER STRUCTURE

摘要

The aim of the invention is to create a light or image sensor in the form of a complete sensor or element that is capable of achieving a high optical filling factor despite the creation of a complex measuring or control electronics unit in the form of a circuit part. To this end, the invention provides a sensor for optical waves which has at least two layers (3, 4, 30) extending laterally in the form of at least flat sections of two semiconductor wafers which are mechanically interconnected (26, 6). A light-sensitive surface (20, 20*) is provided with light-sensitive areas (1, 1', 1'', 1*) which are connected to at least one circuit part (7) by contact openings (5, 15) running essentially vertically to the lateral extension of the sections of the semiconductor wafers (3, 4), in one layer (3) of said semiconductor wafers. The at least one circuit part (7) and electroconductive lines (7a) are allocated to a second layer (4) of the sensor located underneath the first layer (3), at least in sections, and the circuit part (7) and the electroconductive lines (7a) are electroconductively connected to electroconductive material (5a, 15a) through the contact openings (5, 15).