| 摘要 |
1,203,856. Multi-lens device, filters. INTERNATIONAL BUSINESS MACHINES CORP. May 22, 1968 [June 5, 1967], No.24516/68. Heading G2J. A multi-lens optical system comprises a first sheet of transparent material 6 with lenticular recesses 9 in its surface, a second transparent sheet 7 of material defining cavities with the recesses 9 in the first sheet and a fluid 8 in the recesses forming lenses having a different refractive index from either of the sheets. The density of the lenses, which have a radius of curvature of about 25 microns or smaller, may be as great as 1 million per sq. in. The first sheet base member 6 may be composed of thermosetting or thermoplastic resins or preferably glass; examples are given of preferred glasses. Isolation of the lenses is achieved by means of an opaque apertured plate 11 which can be made of chromium or plastics. The fluids may be liquids or gases and may be clear or coloured to act as a filter. Examples are given of preferred liquids. The bottoms of the recesses 9 are spaced from a plane surface 26 Fig. 9, a distance FL substantially equal to the focal length of the lenses. The apertured plate 11 has openings AD with a diameter smaller than that LD of cavities 9 and centred over these cavities. The lens system is used for the manufacture of photographic masks and for the direct exposure of photo-resist coated semi-conductor wafers in the manner described in Specification 1, 003, 897. In another embodiment Fig.14A, 14B (not shown) a transparent base (6A) with recesses (9A) filled with refractive fluid (8A) is attached to a cover lens 7A which is coated with a chromium layer (170) by evaporation. This layer is treated to form apertures, or a developed photo-resist layer may be used as the apertured plate. In a further embodiment Fig.15 (not shown), a basic unit comprising a base member (6B) with an optional apertured plate (11B) and a cover lens member (7B) encasing lenticular recesses (9B) filled with a refractive fluid (8B), has a second optional apertured plate (7C) and a second base member (6C) with refractive fluid, fixed to the exposed face of cover lens (11B). Various combinations of components having different indices of refraction may be employed for optical corrections for example aberration. The lens is used in the manufacture of semi-conductor devices. Methods of making the lens assemblies using an X-Y punch micrometer or a photo-resist etching process are described. |
