ENERGY-CONSERVATION TYPE PHOTOMASK

摘要

PURPOSE: To provide a mask capable of more deeply performing development with the same exposure energy. CONSTITUTION: This mask is provided with at least one or more first pattern areas 23 capable of transmitting an exposure source through the mask without diffracting it and a second pattern area where many auxiliary patterns 23' for performing the slit function of the exposure source are formed so as to diffract the exposure source and increase the exposure energy of the first area 23 but provide the energy incapable of developing a photosensitive film by the diffracted light.