| 摘要 |
<p>A method of making a count probe for counting particles comprises the following steps. A count wafer is formed along with a core member having an opening for accepting the count wafer. The count wafer is applied to the opening in the core member to form an interference fit between the count wafer and the core member. After application of the count wafer to the opening in the core member, the core member is annealed to relieve stress in the core member.</p> |
