发明名称 Resist compositions.
摘要 <p>A resist based on a living polymer is provided. Living anionic polymerization of p-alkoxystyrene monomers results in polymers having a molecular weight distribution (Mw/Mn) of 1 to 1.4.</p>
申请公布号 EP0488748(A1) 申请公布日期 1992.06.03
申请号 EP19910311046 申请日期 1991.11.28
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 YAMADA, MOTOYUKI ROOM NO. 404 RINWA SUNNY COURT;WATANABE, OSAMU ROOM NO. 309 AOBADAI APT.;YAGIHASHI, FUJIO ROOM NO. 101 AOBADAI APT.;TAKAMIZAWA, MINORU 8-21, KITAZAWA 4-CHOME
分类号 G03F7/004;C08F12/22;G03F7/029;G03F7/039;H01L21/027 主分类号 G03F7/004
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