Two-dimensional electric motor, exposure apparatus and semiconductor fabrication method,申请号EP20000102790-传众专利搜索

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发明名称	Two-dimensional electric motor, exposure apparatus and semiconductor fabrication method
摘要
申请公布号	EP1124310(A3)	申请公布日期	2002.04.10
申请号	EP20000102790	申请日期	2000.02.10
申请人	NIKON CORPORATION	发明人	SOGARD, MICHAEL R.
分类号	H01L21/68;G03F7/20;H01L21/027;H02K41/03;(IPC1-7):H02K41/03	主分类号	H01L21/68
代理机构		代理人
主权项
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