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发明名称
FOCUSED ION BEAM PROCESSING POSITIONING METHOD
摘要
申请公布号
JPH1092364(A)
申请公布日期
1998.04.10
申请号
JP19960247523
申请日期
1996.09.19
申请人
HITACHI LTD
发明人
IWATA KOJI
分类号
H01J37/147;H01J37/30;H01L21/302;(IPC1-7):H01J37/147
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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