发明名称 METHOD FOR ANALYZING STRUCTURE OF CRYSTAL
摘要 <p>PROBLEM TO BE SOLVED: To provide a method for analyzing the structure of crystal, capable of readily judging whether a spreading shape of a peak to be measured is decided by reflecting that a composition in the crystal is distributed nonuniformaly, when evaluating the crystal structure by X-ray diffraction. SOLUTION: The method for analyzing the structure of crystal includes a step of measuring profiles of a plurality of (hkl) reflections at a symmetrically reflecting position with respect to an X-ray incident angle (θ) and converting the profiles into a differenceΔΘ(abscissa axis) from a reference point, a step of converting the abscissa axis in accordance with the formula ofΔA(hkl)=--(2 a03/λ2h2)sin 2θB1(hkl)×Δθ(hkl), a step of making a graph obtained by plottingΔA (hkl) value of a feature point with respect to an amount (k2+12)/h2 calculated from an exponent (hkl), and a step of determining whether the graph is a straight line. Thus, by conducting decision theoretic analysis using the graph, a reply can be simply and surely given to the problem as to whether the spreading shape of the peak occurs due to a distribution of the composition.</p>
申请公布号 JP2002014060(A) 申请公布日期 2002.01.18
申请号 JP20000197638 申请日期 2000.06.30
申请人 NIPPON TELEGR & TELEPH CORP <NTT> 发明人 NAKAJIMA KIICHI;KAWAGUCHI NOBUHIRO
分类号 G01N23/20;H01L21/66;H01L29/04;(IPC1-7):G01N23/20 主分类号 G01N23/20
代理机构 代理人
主权项
地址