| 摘要 |
A method and device for automatic focusing in an optical system is provided. A structure having a periphery is reproduced by an objective and an electronic representation of the structure reproduced by the objective is generated. The intensity variation at the periphery of the structure is analyzed in the electronic representation. An application focus value, indicating how the current focus position of the objective is related to an optimal focus position for an application, is determined using the intensity variation. The application focus value indicates whether the current focus position of the objective is above or below the optimal focus position and how far away the current focus position of the objective is from the optimal focus position.
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