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发明名称
MANUFACTURE OF PROTECTIVE FILM FOR COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPH04275427(A)
申请公布日期
1992.10.01
申请号
JP19910037006
申请日期
1991.03.04
申请人
NEC CORP
发明人
OKAMOTO AKIHIKO
分类号
H01L21/314;H01L23/14;H01L31/10;H01S5/00
主分类号
H01L21/314
代理机构
代理人
主权项
地址
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