| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to drive ultrasonic actuators with excellent controllability and high resolution while increasing the thrust by disposing a plurality of actuators in the same direction by providing phase shifting means for differentiating the phases of drive power to be applied to the actuators from a drive signal source to generate the phase difference of standing wave elliptical vibration. SOLUTION: A resonance frequency signal generator 3 of a drive signal source generates a signal of resonance frequency for generating primary longitudinal vibration and secondary bending vibration of an ultrasonic actuator 1. A plurality of driving phase shifters 6 generate signals having the phase difference of predetermined standing wave elliptical vibration. Thus, when a plurality of the actuators 1 are disposed in the same direction to increase the thrust, the driving operation of high resolution can be performed by the fine control operation such as the precise positioning of a body 2 to be driven, suppression of irregular moving speed and the suppression of the vibration. |
