| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a failure detection apparatus capable of detecting an open/short failure of an SSR device. <P>SOLUTION: In the failure detection apparatus 4, connected to a thermal control system having an SSR device 3 disposed between a heater 1 and a power supply portion 1A to adjust the amount of electric power supplied to the heater from the power supply portion in response to a thermal control signal, and having a thermal control device 6 for monitoring the temperature of the heater and outputting the thermal control signal to set the temperature of the heater to the target temperature on the basis of the monitored temperature to detect the failure of the SSR device, the failure detection apparatus comprises a thermal control signal decision portion 33 for deciding whether the thermal control signal is in on state or not, a heater current decision portion 34 for deciding whether the heater current between the SSR device and the heater is in on state or not, and an SSR failure decision portion 35 for deciding the failure of the SSR device on the basis of the decided result of the thermal control signal decision portion and the decided result of the heater current decision portion. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
