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发明名称
配线膜之形成方法
摘要
本发明系于形成由纯铝或铝合金所成之单层配线膜时,提供侧壁之圆锥角度可良好地蚀刻为规定范围内之圆锥状之配线膜之形成方法。后烘烤后,使用含硝酸、磷酸、醋酸及水之蚀刻液,蚀刻纯铝膜或铝合金膜使侧壁之圆锥角度成10至70°之圆锥状。此时,使上述之后烘烤温度:x(℃)为110℃以下,并且使该后烘烤温度与上述蚀刻液之硝酸浓度:y(质量%)满足下述式(1)以形成配线膜。10≦[(2/3)x-5y]≦70…(1)
申请公布号
TW200732514
申请公布日期
2007.09.01
申请号
TW095143777
申请日期
2006.11.27
申请人
神户制钢所股份有限公司
发明人
后藤裕史;钉宫敏洋;富久胜文
分类号
C23F1/20(2006.01);C09K13/06(2006.01);G02F1/1335(2006.01)
主分类号
C23F1/20(2006.01)
代理机构
代理人
林志刚
主权项
地址
日本
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