发明名称 Multibit electro-mechanical memory device and method of manufacturing the same
摘要 A memory device comprises a cantilever electrode comprising a first portion that is supported by a pad electrode, and that extends from the pad electrode, and further comprising a second portion that arches over an upper part of the lower word line, wherein a lower void is between the second portion of the cantilever electrode and the lower word line, and wherein the second portion of the cantilever electrode, in a first position, is curved, wherein a trap site extends above the cantilever electrode, the trap site separated from the cantilever electrode by an upper void, and wherein an upper word line on the trap site receives a charge that enables the second portion of the cantilever electrode, in a second position, to be curved toward the trap site.
申请公布号 US2009072297(A1) 申请公布日期 2009.03.19
申请号 US20080154474 申请日期 2008.05.23
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE JI-MYOUNG;KIM MIN-SANG;YUN EUN-JUNG;LEE SUNG-YOUNG;CHOI IN-HYUK
分类号 H01L21/28;H01L29/792 主分类号 H01L21/28
代理机构 代理人
主权项
地址