摘要 |
A memory device comprises a cantilever electrode comprising a first portion that is supported by a pad electrode, and that extends from the pad electrode, and further comprising a second portion that arches over an upper part of the lower word line, wherein a lower void is between the second portion of the cantilever electrode and the lower word line, and wherein the second portion of the cantilever electrode, in a first position, is curved, wherein a trap site extends above the cantilever electrode, the trap site separated from the cantilever electrode by an upper void, and wherein an upper word line on the trap site receives a charge that enables the second portion of the cantilever electrode, in a second position, to be curved toward the trap site.
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