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发明名称
FORMATION OF OPENINGS IN INSULATING LAYERS IN MOS SEMICONDUCTOR DEVICES
摘要
申请公布号
US3674551(A)
申请公布日期
1972.07.04
申请号
USD3674551
申请日期
1970.10.12
申请人
RCA CORP.
发明人
TERRY GEORGE ATHANAS
分类号
H01L21/00;H01L21/32;H01L23/29;H01L23/485;H01L27/00;(IPC1-7):C23F1/02
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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