| 摘要 |
PURPOSE:To prevent the lowering in oil viscosity by removing a dissolved gas component, by purifying the oil of an oil rotary pump used in reactive ion etching by a filter and a fractional distillation apparatus. CONSTITUTION:Oil used in an oil rotary pump 1 is sent to a filter 4 under pressure to filter the solid substance in the oil while the dissolved component therein is removed by fractional distillation apparatus 5 to return the purified oil to the oil rotary pump 1. In the fractional distillation apparatus 5, the oil to be treated is fallen onto fractional distillation trays from an opening 10 and a small orifice 11 and heated by a heater 8 to evaporate the dissolved component such as CCl4 in the oil. In purifying the CCl4-containing oil, the fractional distillation apparatus 9 is heated to 100 deg.C.
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