| 摘要 |
PURPOSE:To achieve a large output laser light by placing a plurality of spark discharge pins for preliminary ionization on the rear surface of a main electrode which is a cathode in a pair of main electrodes and a plurality of spark discharge pins for preliminary ionization together and by connecting a control device for discharging each spark discharge pin in a specified amount of time, CONSTITUTION:A plurality of spark discharge pins 3 for preliminary ionization are provided at the rear surface side of a main electrode 2 in mesh-shape which is placed opposing a main electrode 1 and a plurality of spark discharge pins 10 for auxiliary ionization are provided along with these spark discharge pins 3 for preliminary ionization. Switches S1-S3 are connected to a control device 11 which controls each switch operation at a specified time. Then, after glow discharge occurs, the spark discharge pin 3 for auxiliary ionization is discharged, thus ionizing laser gas near a cathode and supplying electrons which result in shortage due to grow discharge. It achieves a large output laser light. |
