| 发明名称 |
PROTECTIVE OPTICAL COATING AND METHOD FOR USE THEREOF |
| 摘要 |
A multilayer optical coating for semiconductor substrates characterized in that it is etchable by conventional techniques used for fabrication of integrated circuits and has high reflectivity. |
| 申请公布号 |
IL78730(A) |
申请公布日期 |
1990.03.19 |
| 申请号 |
IL19860078730 |
申请日期 |
1986.05.08 |
| 申请人 |
AVNER PDAHTZUR;ZVI OR-BACH |
发明人 |
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| 分类号 |
H01L23/31;H01L23/525;H01L27/092;(IPC1-7):H01L21/54 |
主分类号 |
H01L23/31 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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