| 摘要 |
PURPOSE:To accurately measure the phase change of a reception signal received by a plurality of vibrators. CONSTITUTION:In the ultrasonic microscope with a plurality of vibrators which are excited by a drive signal and apply ultrasonic waves to a sample 9 and at the same time convert the reflection ultrasonic wave from the sample 9 to an electilcal signal and then receive, a transmission means 21 which supplies a drive signal to a plurality of vibrators and simultaneously applies ultrasonic waves by the plurality of vibrators, a phase difference detection means 43 for detecting the phase difference between the reception signal from each vibrator and the drive signal, and a sound speed calculation means 47 for calculating the sound speed of the sample from the phase difference and the amplitude of each reception signal, phase compensation means 25a and 25b for compensating the phase of reception signals by delaying the reception signal from each vibrator are provided. Then, a phase difference detection means 43 detects phase difference based on the reception signal whose phase is compensated by the phase compensation means 25a and 25b. |
