发明名称 LEVEL SENSOR, LIQUID CONTAINER AND LIQUID QUANTITY DETECTING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a level sensor capable of effectively knowing the residual quantity of liquid of a container, the liquid container and a liquid quantity detecting method. SOLUTION: The level sensor 18 has a monitoring unit 23 connected to sensor probes 20a, 20b arranged in the liquid container 4. The monitoring unit 23 has a probe potential difference detection part 25 detecting the output potential difference of the sensor probes 20a, 20b, a level discrimination part 26 discriminating the level of liquid from the detected result, and a liquid use quantity calculation part 27 counting the number of times of the bubbling period of bubbling gas from the detected result of the probe potential difference detection part 25 and calculating the use quantity and the residual quantity of liquid in the liquid container 4 from the number of times of the bubbling period and liquid use quantity data per unit bubbling period previously stored.
申请公布号 JP2002162286(A) 申请公布日期 2002.06.07
申请号 JP20000333678 申请日期 2000.10.31
申请人 APPLIED MATERIALS INC 发明人 SHIRAI YOSHIKATSU;MURAYAMA YUJI
分类号 G01F23/22;G01F11/00;(IPC1-7):G01F23/22 主分类号 G01F23/22
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