发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF, ACTIVE MATRIX SUBSTRATE, ELECTRO-OPTIC DEVICE, AND ELECTRONIC APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device which reduces deterioration in the electrical characteristics of a semiconductor layer due to the floating effect of a substrate and which exhibits superior electrical characteristics, as well as to provide a manufacturing method for such a semiconductor device, an active matrix substrate, an electro-optic device, and an electronic apparatus. SOLUTION: On the semiconductor device, a gate electrode 26 is formed on a substrate body 10A, and a monocrystal semiconductor layer 1 is formed on the gate electrode 26 via insulating layers 2, 11, while a non-monocrystal semiconductor layer 4 is formed which covers at least a channel region 1c on the monocrystal semiconductor layer 1 at the surface on the opposite side of the surface where the gate electrode 26 is formed on the monocrystal semiconductor layer 1. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008227157(A) 申请公布日期 2008.09.25
申请号 JP20070063493 申请日期 2007.03.13
申请人 SEIKO EPSON CORP 发明人 OKUYAMA TOMOYUKI
分类号 H01L29/786;G02F1/1368;G09F9/30;H01L21/02;H01L21/336;H01L27/12 主分类号 H01L29/786
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