| 摘要 |
PURPOSE:To keep the temperature of melt in an inner crucible constant and to carry out crystal pulling well, by making the melt put in an outer crucible flow through a through hole to the inner crucible, rotating the inner crucible on its vertical center line. CONSTITUTION:The inner crucible 3 suspended from the upper part through the holding fixture 10 by the supporting rod 11 is concentrically penetrated into the outer crucible 2 set in the furnace body 1, the melt 4 put in the outer crucible 2 is made to flow through the through hole 5 bored at the bottom wall of the inner crucible 3 into the inner crucible 3. The motor 16 is rotated, the upper bearer 14 is moved vertically and rotated, the inner crucible 3 is moved vertically through the holding mixture 10, and rotated on the vertical center line 12. In this state, the winder 22 is operated, and the crystal 8 is pulled up. By this process and method, the temperature distribution of the melt 4 in the inner crucible 3 can be uniformed and the high-quality crystal 8 can be grown. |
